COMMENT ON Plasma processing during the Fall 2026 SAM
Completed second round of plasma processing 1L07-2,4,6 and 8. started 1L07-1,3,5 and 7, will be completed tomorrow.
At the end of the shift. We secured the RF and turned off the amplifiers. We closed off the gas supply valve at the cavity gas supply* valve. (* 1/4" valve) just upstream of the gas supply manifold which is connected to the right angle valve on VIP1L08A. We pumped out the gas supply cart between the outputs of the MFCs and the input to the cavity gas supply valve using the scroll pump on the gas supply cart.










